MEMS-based voltage detector
Helistö P, Seppä H, Manninen ACapacitive sensors; MEMS; Readout; Pull-in; Noise; Voltage measurement
Document type | Article |
Journal title / Source | Sensors and Actuators A: Physical |
Peer-reviewed article | 1 |
Volume | 234 |
Issue | n/a |
Page numbers / Article number | 99-103 |
Publisher's name | Elsevier |
Publisher's address (city only) | Amsterdam |
Publication date | 2015-8-24 |
ISSN | n/a |
DOI | 10.1016/j.sna.2015.08.011 |
Web URL | https://www.researchgate.net/publication/282373168_MEMS-based_voltage_detector |
Language | English |