IMPROVEMENT IN LONG TERM STABILITY OF THE LONG RANGE AFMS
Vorbringer-Dorozhovets N., Manske E.AFM, long range AFM, nanopositioning and nanomeasuring machine, NPM machine, long distance measurements
Document type | Proceedings |
Journal title / Source | XXI IMEKO World Congress - Full Papers |
Issue | 1 |
Page numbers / Article number | 2279 |
Publisher's name | Czech Technical University |
Publisher's address (city only) | Prague |
Publication date | 2015 |
Conference name | XXI IMEKO World Congress |
Conference date | August 30 - September 4, 2015 |
Conference place | Prague |
ISBN | 978-80-01-05793-3 |
Language | English |