Good practice guide for the measurement of the cantilever normal spring constant using a MEMS device
Gao S.MEMS, AFM-cantilever
Document type | Good Practice Guide |
Journal title / Source | |
Publication date | 2015-10-14 |
Web URL | http://www.ptb.de/emrp/resources/documents/tmompon/2015_Gao_Guide_CantiCali_MEMS.pdf |
Language | English |