In-situ nondestructive characterization of the normal spring constant of AFM cantilevers
Gao Sai, Brand Uwedynamic reference spring (DRS), MOEMS nano-force transducer, normal spring constant, stiffness, AFM cantilever
Document type | Article |
Journal title / Source | Measurement Science and Technology |
Volume | 25 |
Issue | 044014 |
Publication date | 2014-3-5 |
DOI | 10.1088/0957-0233/25/4/044014 |
Web URL | http://iopscience.iop.org/0957-0233/25/4/044014/article |