Characterization of ZnO structures by optical and X-ray methods
Petrik PP, Pollakowski BP, Zakel SZ, Gumprecht TG, Beckhoff BB, Lemberger ML, Labadi ZL, Baji ZB, Jank MJ, Nutsch ANZinc oxide, Spectroscopic ellipsometry, X-ray fluorescence, Raman spectrometry, VUV reflectometry, Atomic layer deposition, Sputtering
| Document type | Article |
| Journal title / Source | Applied Surface Science |
| Peer-reviewed article | 1 |
| Volume | 281 |
| Page numbers / Article number | 123-128 |
| Publisher's name | Elsevier |
| Publisher's address (city only) | Philadelphia |
| Publication date | 2013-9-15 |
| ISSN | 0169-4332 |
| DOI | 10.1016/j.apsusc.2012.12.035 |
| Web URL | http://www.sciencedirect.com/science/article/pii/S0169433212021861 |
| Language | English |