Trinano N100 3D Measurements with Nanometer Repeatability and Effects of Probe-Surface Interaction
Bos E., Moers A., van Riel M.Document type | Proceedings |
Journal title / Source | Proceedings of the 27th Annual Meeting of the American Society for Precision Engineering |
Volume | 54 |
Page numbers / Article number | 85-88 |
Publication date | 2012 |
Conference name | 27th Annual Meeting of the American Society for Precision Engineering |
Conference date | 21 - 26 October 2012 |
Conference place | San Diego, CA USA |
ISBN | 978-1-887706-61-2 |