An upgraded data acquisition and drive system at the Nanometer
Köchert P., Köning R., Weichert C., Flügge J., Manske E.interferometer
| Document type | Proceedings |
| Journal title / Source | ASPE Proceedings |
| Page numbers / Article number | 61-66 |
| Publisher's name | American Society for Precision Engineering |
| Publisher's address (city only) | Raleigh |
| Publication date | 2015 |
| Conference name | ASPE Summer Topical Meeting, Precision Interferometric Metrolofy |
| Conference date | July 8-10, 2015 |
| Conference place | Colorado, USA |
| ISBN | 978-1-887706-68-1 |
| Web URL | http://aspe.net/technical-meetings/past-aspe-meetings/aspe-summer-2015/ |
| Language | English |