Measurement of groove depth standards in the range 1 µm up to 1 mm

Project Description

The depth of six v-shaped grooves with nominal values 5/20/50/200/600 and 900 µm have to be measured. The depth has to be measured according to ISO 5436-1. The first type (PTB nickel depth setting standards) contains the three deeper grooves which are separated by a distance of 400 µm, with a width of the grooves in the bottom of 300 µm. The second type of standard is made from single crystal silicon and each standard contains one of the remaining grooves. The width of these grooves varies from  1.77 µm to 1.71 mm.

Final Report 2020-10-13

The comparison has been completed and results are published in the KCDB.

Progress Report 2019-10-02

Draft A2 has been finished.

Length (L)
Uwe Brand (PTB)
Coordinating Institute
PTB (Germany)
Further Partners
NMISA (South Africa)
VNIIMS (Russia)