Proposal, September 2005
Precise positioning in nanometrology, scanning probe microscopy, and process control in nanofabrication needs of traceable displacement actuators operating in the micrometric and nanometric ranges of displacements. High sensitivity actuators have usually onboard position sensors in a closed-loop control of displacements.
The proposed cooperation in research is a pilot study on interferometric measurements of displacements (from the micrometric range down to the sub-wavelength range) of high-sensitivity actuators. The project has been re-proposed and discussed at the 2004 TC Length Meeting.
IMGC will circulate a commercial piezo-capacitive
The DPT-10 manual from the manufacturer will be provided.