Intercomparison of Measurement on Step Height Standards by SPM

Project Description

The comparison should support the MRA. The standards are similar to those of the NANO2, but with smaller lines of 3 µm, 6µm and 20 µm. Based on the properties of the SPM the 6 µm line will be used. Three standards with nominal step heights of 40 nm, 1000 nm and 2000 nm will be used. During the NANO2 preliminary inter-laboratory comparison on step height standards the PTB was ask to perform bilateral comparisons on step height for scanning probe microscopes. Therefore we plan to set up a new comparison for SPM in which the participating institutes should perform measurements on step height standards. The comparison should support the MRA. The standards used are similar to those of the NANO2, but with smaller lines of 3 µm, 6 µm, and 20 µm. The step height standards cover a range from 7 nm to 2400 nm.

Further Information

The technical report will be sent to the participants in the next weeks. The comparison should start in Feb. 2004. Nevertheless, interested partners could inform the pilot lab by an e-mail in which they announce their interest to participate with their scanning probe microscope. Please, send information about the measurement range (x,y, z) and the measurement mode of the SPM, too. The project is in the feasibility stage. More details can be given in April 2003. The comparison could start in summer 2003. Possible partners have or will be informed by e-mail. Nevertheless, interested partners could inform the pilot lab. by an e-mail in which they announce their interest to participate with their scanning probe microscope. Please, send information about the measurement range (x,y,z) and the measurement mode of the SPM, too.

Subjects
Length (L)
Coordinator
Dr Ludger Koenders, PTB (Germany)
Coordinating Institute
PTB (Germany)