High and ultra-high vacuums are used for cutting edge materials research and in the production of microelectronics. Ionisation gauges are the only method for measuring pressure in such vacuums. Different approaches to constructing ionisation gauges, and different gasses used for the ionisation process, has lead to significant differences in the relative sensitivity factors between them with all lacking long-term stability. The performance of the approaches could be greatly improved by standardisation.
This project will use results from EMRP project IND12 Vacuum and EMPIR project 14SIP01 Vacuum ISO to specify all relevant parameters for an improved and standardised ionisation gauge, including gathering data on the relative sensitivities of gasses used in different gauge types. The technical results will inform new ISO standards on ionisation gauges. A standardised ionisation gauge with long term stability will provide a reliable reference standard for calibration laboratories, and be easily reproduced by manufacturers, allowing them to meet the forthcoming standard. This will provide greater accuracy to the vacuum market, and the many industries it supports.