Light-matter interplay for optical metrology beyond the classical spatial resolution limits
Short Name: BeCOMe, Project Number: 17FUN01
Nanoscale optical measurements with quantum optics and other techniques
Micro-nanoelectronics, nanotechnology, photonics and advanced materials have been identified by the EU as four strategically important technology sectors; their combined global market is worth € 800 billion, with photonics and micro-nanoelectronics employing more than 400,000 people in Europe.
As a measurement tool, optical systems have the advantages of speed, non-invasiveness and reliability.
However, high technology sectors are increasingly working at the nanoscale, and traditional optics-based measurement systems cannot achieve the spatial resolution required; new techniques therefore need to be developed to overcome current limitations.
This project will develop new optical measurement techniques for the investigation of structures at the nanoscale, with traceable spatial resolution beyond classical limits and sub-nanometre accuracy.
Approaches to higher resolution systems include: the development of new “metamaterial” structures; near-field methods; quantum optics techniques that exploit photon entanglement; the decoding of other information contained in optical waves.
End-user events and scientific publications will help promote the uptake of quantum-based and other innovative optics tools in high-technology sectors.
EMPIR project 20FUN02 POLight builds on this work.
Advanced Photonics Research
Computer Physics Communications
Nanoscale Advances
New Journal of Physics
Physical Review Applied
EPJ Quantum Technology
Physical Review A
Measurement Science and Technology
Journal of Optics
Applied Physics Letters
Optics Express
Communications Physics
Optics Express
Physical Review Research
Optics Express
Metrologia
Metrologia
Metrologia
Nature Communications
Metrology, Inspection, and Process Control for Microlithography XXXIII
International Journal of Quantum Information
Journal of the European Optical Society-Rapid Publications
Advanced Quantum Technologies
ACS Photonics
Deutsche Gesellschaft für angewandte Optik Proceedings 2019
Modeling Aspects in Optical Metrology VII
physica status solidi (b)
Physical Review B
Scientific Reports
Quantum Photonic Devices 2018
Physical Review Applied