Advanced 3D chemical metrology for innovative technologies
Short Name: 3DMetChemIT, Project Number: 14IND01
Advanced 3D chemical measurements for high-value manufacturing
European industry and manufacturing had a need for improved capability for 3D-resolved chemicalcomposition and interfacial material properties measurement. This project advanced the measurementcapability and developed trusted measurement procedures for 3D chemical imaging at the micro- and nanoscale.Prototype instrumentation is now available and accessed by industry at consortium partnerorganisations using the developed procedures.
Coordinator: Rasmus Havelund, NPL
For more information, please contact the EURAMET Management Support Unit:
Phone: +44 20 8943 6666
E-mail: empir.msu@euramet.org
Nanoscale
Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Physical Review A
Journal of The American Society for Mass Spectrometry
The Journal of Physical Chemistry C
Nanotechnology
physica status solidi (a)
Ultramicroscopy
The Journal of Physical Chemistry C
Nanoscale Research Letters