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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Quantifying parameter uncertainties in optical scatterometry using Bayesian inversion

Hammerschmidt, M, Weiser, M, Garcia Santiago, X, Zschiedrich, L, Bodermann, B (PTB) and Burger, S
Keywords:

computational metrology, optical metrology, computational lithography, nanolithography, finite-element methods, nanooptics

Document typeProceeding
Journal title / SourceProc. SPIE
Volume10330
Page numbers / Article number1033004
Publication date 2017
Conference nameModeling Aspects in Optical Metrology VI
Conference date25-06-2017 to 29-06-2017
Conference placeMunich
DOI10.1117/12.2270596
Web URLhttps://arxiv.org/pdf/1707.08467
LanguageEnglish

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