Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers

Zakrisson J., Silander I., Forssén C., Zelan M., Axner O.
Keywords:

Cavity Deformation, Fabry-Perot, refractomtery, Gas Modulation refractomtery (GAMOR)

Document type Article
Journal title / Source Journal of Vacuum Science & Technology B
Volume 38
Issue 5
Page numbers / Article number 054202
Publisher's name American Vacuum Society
Publication date 2020-9
ISSN 2166-2746, 2166-2754
DOI 10.1116/6.0000375
Language English

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