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Procedure for robust assessment of cavity deformation in Fabry–Pérot based refractometers

Zakrisson, J., Silander, I., Forssén, C., Zelan, M. (Department of Measurement Technologies, SP Technical Research Institute of Sweden, Borås, Sweden) and Axner, O.
Keywords:

Cavity Deformation, Fabry-Perot, refractomtery, Gas Modulation refractomtery (GAMOR)

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology B
Volume38
Issue5
Page numbers / Article number054202
Publisher's nameAmerican Vacuum Society
Publication date 2020-09
ISSN2166-2746, 2166-2754
DOI10.1116/6.0000375
LanguageEnglish

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