Multiple fibre interferometry setup for probe sample interaction measurements in atomic force microscopy

Klapetek P., Yacoot A., Hortvík V., Duchoň V., Dongmo H., Rerucha S., Valtr M., Nečas D.
Keywords:

atomic force microscopy, Fibre interferometry, probe sample interaction, nanometrology

Document type Article
Journal title / Source Measurement Science and Technology
Publisher's name IOP Publishing
Publication date 2020-4
ISSN 0957-0233, 1361-6501
DOI 10.1088/1361-6501/ab85d8
Language English

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