Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

XU M., Zhou Z., Ahbe T., Peiner E., Brand U.
Keywords:

roughness measurement, piezoresistive microprobe, silicon fracture, tip characterization

Document type Article
Journal title / Source Sensors
Volume 22
Issue 3
Page numbers / Article number 1298
Publisher's name MDPI AG
Publication date 2022-2
ISSN 1424-8220
DOI 10.3390/s22031298
Web URL https://www.mdpi.com/1424-8220/22/3/1298
Language English

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