Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Using a Tip Characterizer to Investigate Microprobe Silicon Tip Geometry Variation in Roughness Measurements

XU, M. (PTB), Zhou, Z., Ahbe, T. (PTB, Braunschweig, Germany), Peiner, E. (TU Braunschweig) and Brand, U.
Keywords:

roughness measurement, piezoresistive microprobe, silicon fracture, tip characterization

Document typeArticle
Journal title / SourceSensors
Volume22
Issue3
Page numbers / Article number1298
Publisher's nameMDPI AG
Publication date 2022-02
ISSN1424-8220
DOI10.3390/s22031298
Web URLhttps://www.mdpi.com/1424-8220/22/3/1298
LanguageEnglish

Back to the list view