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Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

XU, M. (PTB), Li, Z. (PTB), Fahrbach, M., Peiner, E. (TU Braunschweig) and Brand, U.
Keywords:

roughness measurement, piezoresistive microprobe, high-speed surface measurement

Document typeArticle
Journal title / SourceSensors
Volume21
Issue5
Page numbers / Article number1557
Publisher's nameMDPI AG
Publication date 2021-02-24
ISSN1424-8220
DOI10.3390/s21051557
LanguageEnglish

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