Investigating the Trackability of Silicon Microprobes in High-Speed Surface Measurements

XU M., Li Z., Fahrbach M., Peiner E., Brand U.
Keywords:

roughness measurement, piezoresistive microprobe, high-speed surface measurement

Document type Article
Journal title / Source Sensors
Volume 21
Issue 5
Page numbers / Article number 1557
Publisher's name MDPI AG
Publication date 2021-2-24
ISSN 1424-8220
DOI 10.3390/s21051557
Language English

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