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Note: Nanomechanical characterization of soft materials using a micro-machined nanoforce transducer with an FIB-made pyramidal tip

Wollschläger, N., Hiller, K. (TU Chemnitz), Brand, U., Gao, S., Li, Z. (PTB) and Pohlenz, F.
Keywords:

MEMS, nanoindentation, soft materials

Document typeArticle
Journal title / SourceReview of Scientific Instruments
Volume88
Issue3
Page numbers / Article number036104
Publisher's nameAIP Publishing
Publication date 2017-03
ISSN0034-6748, 1089-7623
DOI10.1063/1.4977474
LanguageEnglish

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