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Interferometric step gauge for CMM verification

Widmaier, T. (Aalto University School of Engineering), Viitala, R., Rantanen, A., Laukkanen, P. (Aalto University, Aalto, Finland), Esala, V.P., Hemming, B. (MIKES Centre for Metrology and Accreditation), Kuosmanen, P. (Aalto University School of Engineering) and Lassila, A.
Keywords:

CMM, verification, metrology

Document typeArticle
Journal title / SourceMeasurement Science and Technology
Volume29
Issue7
Page numbers / Article number074012
Publisher's nameIOP Publishing
Publication date 2018-06
DOI10.1088/1361-6501/aabd2b
Web URLhttp://iopscience.iop.org/article/10.1088/1361-6501/aabd2b
LanguageEnglish

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