Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

Vorbringer-Dorozhovets N, Goj B, Machleidt T, Franke K-H, Hoffmann M, Manske E
Keywords:

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, AFM, electromagnetic changer for SPM probes, fiducial marks

Document type Article
Journal title / Source Meas. Sci. Technol.
Volume 25
Issue 044006
Publication date 2014
DOI 10.1088/0957-0233/25/4/044006

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