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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine

Vorbringer-Dorozhovets, N, Goj, B, Machleidt, T, Franke, K-H, Hoffmann, M and Manske, E
Keywords:

nanopositioning and nanomeasuring machine, metrological scanning probe microscope, AFM, electromagnetic changer for SPM probes, fiducial marks

Document typeArticle
Journal title / SourceMeas. Sci. Technol.
Volume25
Issue044006
Publication date 2014
DOI10.1088/0957-0233/25/4/044006
LanguageEnglish

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