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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Dimensional Stability Validation and Sensor Calibration with Sub-nanometer Accuracy

Voigt, Dirk and Bergmans, Rob H.

Optical metrology; dimensional stability; sensor calibration; displacement interferometry

Document typeProceeding
Publication date 2012-10
Conference nameInternational Conference on Space Optics
Conference date2012
Conference placeAjaccio, France
Web URLhttp://www.congrexprojects.com/custom/icso/2012/papers/FP_ICSO-123.pdf

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