Hybrid modeling of time-dependent rarefied gas expansion

Vargas Manuel, Naris Steryios, Valougeorgis Dimitris, Pantazis Sarantis, Jousten Karl
Keywords:

vacuum, kinetic theory, Knudsen number, dynamic gas espansion, hybrid modeling

Document type Article
Journal title / Source Journal of Vacuum Science and Technology A
Volume 32
Issue 2
Publication date 2013
DOI 10.1116/1.4830283

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