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Hybrid modeling of time-dependent rarefied gas expansion

Vargas, Manuel, Naris, Steryios, Valougeorgis, Dimitris, Pantazis, Sarantis and Jousten, Karl
Keywords:

vacuum, kinetic theory, Knudsen number, dynamic gas espansion, hybrid modeling

Document typeArticle
Journal title / SourceJournal of Vacuum Science and Technology A
Volume32
Issue2
Publication date 2013
DOI10.1116/1.4830283
LanguageEnglish

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