Metrology challenges for microfluidics
van Heeren H., Silverio V., Pecnik C., Batista E.Microfluidics, metrology, fabrication, testing
Document type | Article |
Journal title / Source | CMM Magazine |
Volume | 15 |
Issue | 2 |
Page numbers / Article number | 20-25 |
Publisher's name | MST Global Ltd |
Publication date | 2022-4-13 |
ISSN | 2634-9167 |
Web URL | http://www.cmmmagazine.com/cmm-articles/metrology-challenges-for-microfluidics/ |
Language | English |
Persistent Identifier | ISSN 2634-9167 |