Toward accurate composition analysis of GaN and AlGaN using atom probe tomography

Morris R.J.H., Cuduvally R., Melkonyan D., Fleischmann C., Zhao M., Arnoldi L., van der Heide P., Vandervorst W.
Keywords:

accuracy, composition, Atom probe, GaN

Document type Article
Journal title / Source Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Volume 36
Issue 3
Page numbers / Article number 03F130
Publisher's name American Vacuum Society
Publication date 2018-5
ISSN 2166-2746, 2166-2754
DOI 10.1116/1.5019693
Web URL https://avs.scitation.org/doi/10.1116/1.5019693
Language English

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