Toward accurate composition analysis of GaN and AlGaN using atom probe tomography
Morris R.J.H., Cuduvally R., Melkonyan D., Fleischmann C., Zhao M., Arnoldi L., van der Heide P., Vandervorst W.accuracy, composition, Atom probe, GaN
Document type | Article |
Journal title / Source | Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena |
Volume | 36 |
Issue | 3 |
Page numbers / Article number | 03F130 |
Publisher's name | American Vacuum Society |
Publication date | 2018-5 |
ISSN | 2166-2746, 2166-2754 |
DOI | 10.1116/1.5019693 |
Web URL | https://avs.scitation.org/doi/10.1116/1.5019693 |
Language | English |