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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Toward accurate composition analysis of GaN and AlGaN using atom probe tomography

Morris, R.J.H., Cuduvally, R., Melkonyan, D., Fleischmann, C. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium), Zhao, M., Arnoldi, L., van der Heide, P. and Vandervorst, W. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium and Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium)

accuracy, composition, Atom probe, GaN

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Page numbers / Article number03F130
Publisher's nameAmerican Vacuum Society
Publication date 2018-05
ISSN2166-2746, 2166-2754
Web URLhttps://avs.scitation.org/doi/10.1116/1.5019693

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