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Toward accurate composition analysis of GaN and AlGaN using atom probe tomography

Morris, R.J.H., Cuduvally, R., Melkonyan, D., Fleischmann, C. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium), Zhao, M., Arnoldi, L., van der Heide, P. and Vandervorst, W. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium and Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium)
Keywords:

accuracy, composition, Atom probe, GaN

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena
Volume36
Issue3
Page numbers / Article number03F130
Publisher's nameAmerican Vacuum Society
Publication date 2018-05
ISSN2166-2746, 2166-2754
DOI10.1116/1.5019693
Web URLhttps://avs.scitation.org/doi/10.1116/1.5019693
LanguageEnglish

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