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The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts

Melkonyan, D., Fleischmann, C. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium), Arnoldi, L., Demeulemeester, J., Kumar, A., Bogdanowicz, J., Vurpillot, F. and Vandervorst, W. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium and Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium)

Atom probe tomography, Tip shape, FinFET, Local magnification, Trajectory overlaps

Document typeArticle
Journal title / SourceUltramicroscopy
Page numbers / Article number100-107
Publisher's nameElsevier BV
Publication date 2017-08
Web URLhttps://lirias2repo.kuleuven.be/rest/bitstreams/515063/retrieve

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