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Atom probe tomography analysis of SiGe fins embedded in SiO 2 : Facts and artefacts

Melkonyan, D., Fleischmann, C. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium), Arnoldi, L., Demeulemeester, J., Kumar, A., Bogdanowicz, J., Vurpillot, F. and Vandervorst, W. (IMEC, Kapeldreef 75, B-3001 Heverlee, Belgium and Instituut voor Kern- en Stralingsfysica, KU Leuven, Celestijnenlaan 200D, B-3001 Leuven, Belgium)
Keywords:

Atom probe tomography, Tip shape, FinFET, Local magnification, Trajectory overlaps

Document typeArticle
Journal title / SourceUltramicroscopy
Volume179
Page numbers / Article number100-107
Publisher's nameElsevier BV
Publication date 2017-08
ISSN0304-3991
DOI10.1016/j.ultramic.2017.04.006
Web URLhttps://lirias2repo.kuleuven.be/rest/bitstreams/515063/retrieve
LanguageEnglish

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