PICOMETER RESOLUTION HETERODYNE INTERFEROMETRY FOR SHORT TO MEDIUM TERM DIMENSIONAL STABILITY MEASUREMENTS
van de Nes A.S., Voigt D.dimensional stability, picometer uncertainty, optical metrology, displacement interferometry
| Document type | Proceedings |
| Journal title / Source | |
| Publication date | 2014-9 |
| Conference name | 58th Ilmenau Scientific Colloquium |
| Conference date | 2014 |
| Conference place | Ilmenau, Germany |
| Web URL | http://www.db-thueringen.de/servlets/DerivateServlet/Derivate-30965/ilm1-2014iwk-148.pdf |