Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

PICOMETER RESOLUTION HETERODYNE INTERFEROMETRY FOR SHORT TO MEDIUM TERM DIMENSIONAL STABILITY MEASUREMENTS

van de Nes, A.S. and Voigt, D.
Keywords:

dimensional stability, picometer uncertainty, optical metrology, displacement interferometry

Document typeProceeding
Publication date 2014-09
Conference name58th Ilmenau Scientific Colloquium
Conference date2014
Conference placeIlmenau, Germany
Web URLhttp://www.db-thueringen.de/servlets/DerivateServlet/Derivate-30965/ilm1-2014iwk-148.pdf

Back to the list view