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Determination of SiO2 and C layers on a monocrystalline silicon sphere by reference-free x-ray fluorescence analysis

Unterumsberger, R. (Physikalisch-Technische Bundesanstalt (PTB)), Pollakowski-Herrmann, B., Lubeck, J., Kolbe, M. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr.2-12, 10587 Berlin, Germany), Holfelder, I., Hönicke, P (Physikalisch-Technische Bundesanstalt (PTB)), Weser, J. and Beckhoff, B.
Keywords:

Avogadro project, X-ray fluorescence, quantification

Document typeArticle
Journal title / SourceMetrologia
Volume54
Issue4
Page numbers / Article number481-486
Publisher's nameIOP Publishing
Publication date 2017-06-28
ISSN0026-1394, 1681-7575
DOI10.1088/1681-7575/aa765f
LanguageEnglish

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