3D-Simulation of a Bayard Alpert ionisation gauge using SIMION program
Silva R., Bundaleski N., Fonseca A.L., Teodoro O.Vacuum measurementIonisation gaugeSimulationGauge sensitivity
Document type | Article |
Journal title / Source | Vacuum |
Volume | 164 |
Page numbers / Article number | 300-307 |
Publisher's name | Elsevier BV |
Publication date | 2019-6 |
ISSN | 0042-207X |
DOI | 10.1016/j.vacuum.2019.03.039 |
Language | English |