High-precision lateral distortion measurement and correction in coherence scanning interferometry using an arbitrary surface
Ekberg P., Su R., Leach R.Image processing, Pattern recognition, Imaging systems, Metrology, Calibration, Microscopy
| Document type | Article |
| Journal title / Source | Optics Express |
| Volume | 25 |
| Issue | 16 |
| Page numbers / Article number | 18703 |
| Publisher's name | The Optical Society of America |
| Publication date | 2017-7-25 |
| ISSN | 1094-4087 |
| DOI | 10.1364/OE.25.018703 |
| Web URL | https://www.osapublishing.org/oe/abstract.cfm?uri=oe-25-16-18703 |
| Language | English |