Electrical Homogeneity Mapping of Epitaxial Graphene on Silicon Carbide

Whelan P.R., Panchal V., Petersen D.H., Mackenzie D.M.A., Melios C., Pasternak I., Gallop J., Østerberg F.W., U. Jepsen P., Strupinski W., Kazakova O., Bøggild P.
Keywords:

conductivity; graphene; metrology; micro four-point probe; SiC; terahertz spectroscopy

Document type Article
Journal title / Source ACS Applied Materials & Interfaces
Volume 10
Issue 37
Page numbers / Article number 31641-31647
Publisher's name American Chemical Society (ACS)
Publication date 2018-8-21
ISSN 1944-8244, 1944-8252
DOI 10.1021/acsami.8b11428
Web URL https://pubs.acs.org/doi/10.1021/acsami.8b11428
Language English

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