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Electrical Homogeneity Mapping of Epitaxial Graphene on Silicon Carbide

Whelan, P.R., Panchal, V., Petersen, D.H., Mackenzie, D.M.A., Melios, C. (NPL, United Kingdom), Pasternak, I., Gallop, J., Østerberg, F.W., U. Jepsen, P., Strupinski, W. (ITME, Poland), Kazakova, O. and Bøggild, P.
Keywords:

conductivity; graphene; metrology; micro four-point probe; SiC; terahertz spectroscopy

Document typeArticle
Journal title / SourceACS Applied Materials & Interfaces
Volume10
Issue37
Page numbers / Article number31641-31647
Publisher's nameAmerican Chemical Society (ACS)
Publication date 2018-08-21
ISSN1944-8244, 1944-8252
DOI10.1021/acsami.8b11428
Web URLhttps://pubs.acs.org/doi/10.1021/acsami.8b11428
LanguageEnglish

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