Very fast-opening UHV gate valve
Sonderegger K., Duer M., Buthig J., Pantazis S., Jousten K.UHV, gate valve, dynamic pressure, gas expansion, load locks
| Document type | Article |
| Journal title / Source | Journal of Vacuum Science and Technology A |
| Volume | 31 |
| Issue | 6 |
| Publication date | 2013 |
| DOI | 10.1116/1.4813836 |