Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Silander I., Hausmaninger T., Forssén C., Zelan M., Axner O.Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision
Document type | Article |
Journal title / Source | Journal of Vacuum Science & Technology B |
Volume | 37 |
Issue | 4 |
Page numbers / Article number | 042901 |
Publisher's name | American Vacuum Society |
Publication date | 2019-7 |
ISSN | 2166-2746, 2166-2754 |
DOI | 10.1116/1.5090860 |
Language | English |