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Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

Silander, I., Hausmaninger, T., Forssén, C., Zelan, M. (Department of Measurement Technologies, SP Technical Research Institute of Sweden, Borås, Sweden) and Axner, O.
Keywords:

Gas equilibration gas modulation refractometry for assessment of pressure with sub-ppm precision

Document typeArticle
Journal title / SourceJournal of Vacuum Science & Technology B
Volume37
Issue4
Page numbers / Article number042901
Publisher's nameAmerican Vacuum Society
Publication date 2019-07
ISSN2166-2746, 2166-2754
DOI10.1116/1.5090860
LanguageEnglish

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