Welcome to the EURAMET Repository Link

The EURAMET Repository Link is an online service providing links to scientific papers published within the European Metrology Research Programme (EMRP), the European Metrology Programme for Innovation and Research (EMPIR) and projects funded by iMERA-Plus.

Summary of ISO/TC 201 Standard: ISO 22415—Surface chemical analysis—Secondary ion mass spectrometry—Method for determining yield volume in argon cluster sputter depth profiling of organic materials

Shard, A.G. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom), Havelund, R. (NPL, National Physical Laboratory, Teddington, Middlesex, TW11 0LW, United Kingdom), Seah, M.P. (National Physical Laboratory, Teddington, TW11 0LW, United Kingdom) and CLIFFORD, C.

ISO, standard, SIMS, sputtering, yield volumes

Document typeArticle
Journal title / SourceSurface and Interface Analysis
Publisher's nameWiley
Publication date 2019-07-15
ISSN0142-2421, 1096-9918
Web URLhttps://doi.org/10.1002/sia.6686

Back to the list view