Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure
Setiono A., Fahrbach M., Deutschinger A., Fantner E.J., Schwalb C.H., Syamsu I., Wasisto H.S., Peiner E.electrothermal piezoresistive cantilever sensors, parasitic feedthrough subtraction, particle mass concentration measurement, cigarette smoke exposure
| Document type | Article |
| Journal title / Source | Sensors |
| Volume | 21 |
| Issue | 12 |
| Page numbers / Article number | 4088 |
| Publisher's name | MDPI AG |
| Publication date | 2021-6-14 |
| ISSN | 1424-8220 |
| DOI | 10.3390/s21124088 |
| Web URL | https://www.mdpi.com/1424-8220/21/12/4088 |
| Language | English |