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In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection

Setiono, A., Bertke, M., Nyang’au, W.O., Xu, J., Fahrbach, M., Kirsch, I., Uhde, E., Deutschinger, A., Fantner, E.J., Schwalb, C. H., Wasisto, H.S. and Peiner, E. (TU Braunschweig)
Keywords:

MEMS piezoresistive cantilever sensors, dynamic mode, carbon nanoparticle, particle mass measurement

Document typeArticle
Journal title / SourceSensors
Volume20
Issue3
Page numbers / Article number618
Publisher's nameMDPI AG
Publication date 2020-01-22
ISSN1424-8220
DOI10.3390/s20030618
LanguageEnglish

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