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Primary calibration of mechanical sensors with digital output for dynamic applications

Seeger, B. and Thomas, B.
Keywords:

Primary calibration; MEMS; complex frequency response; digital interface; dynamic measurement

Document typeArticle
Journal title / SourceActa IMEKO
Volume10
Issue3
Page numbers / Article number177 - 184
Publisher's nameIMEKO
Publisher's address (city only)Braunschweig
Publication date 2021-09
ISSN2221-870X
Web URLhttps://acta.imeko.org/index.php/acta-imeko/article/view/IMEKO-ACTA-10%20%282021%29-03-24/0
LanguageEnglish
Persistent IdentifierIMEKO-ACTA-10 (2021)-03-24

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