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Element sensitive reconstruction of nanostructured surfaces with finite elements and grazing incidence soft X-ray fluorescence

Soltwisch, V. (Physikalisch-Technische Bundesanstalt, Braunschweig & Berlin, Bundesallee 100, D-38116, Braunschweig, Germany), Honicke, P. (Physikalisch-Technische Bundesanstalt (PTB), Abbestr. 2-12, 10587 Berlin, Germany), Kayser, Y., Eilbracht, J., Probst, J. (Helmholtz-Zentrum Berlin (HZB), Hahn-Meitner-Platz 1, D{ 14 109 Berlin, Germany), Scholze, F. and Beckhoff, B.
Keywords:

GIXRF, nanostructure characterization, FEM

Document typeArticle
Journal title / SourceNanoscale
Publisher's nameRoyal Society of Chemistry (RSC)
Publication date 2018
ISSN2040-3364, 2040-3372
DOI10.1039/C8NR00328A
Web URLhttps://arxiv.org/abs/1801.04157
LanguageEnglish

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