Guidelines for the design of calibration substrates, including the suppression of parasitic modes for frequencies up to and including 325 GHz

Schmuckle F.J., Phung G.N., Arz U., Spirito M., Heinrich W., Lozar R.
Keywords:

Calibration, coplanar waveguide (CPW), electromagnetic field simulation, parasitic modes, substrate modes, multiline-thru-reflect-line (mTRL), on-wafer probing, probes

Document type Good Practice Guide
Journal title / Source
Publisher's name Physikalisch-Technische Bundesanstalt (PTB)
Publication date 2019-4-24
DOI 10.7795/530.20190424A
Web URL https://oar.ptb.de/resources/show/10.7795/530.20190424A
Language English

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