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Establishing traceability for on-wafer S-parameter measurements of membrane technology devices up to 110 GHz

Schmuckle, Franz-Josef, Heinrich, Wolfgang, Probst, Thorsten, Arz, Uwe, Zinal, Sherko and Hechtfischer, Gerd
Keywords:

on-wafer, calibration, S-parameters, traceability,uncertainty budget

Document typeProceeding
Journal title / Source2017 90th ARFTG Microwave Measurement Symposium (ARFTG)
Publisher's nameIEEE
Publication date 2017-11-30
Conference nameARFTG Microwave Measurement Symposium
Conference date28-11-2017 to 01-12-2017
Conference placeBoulder, Colorado
DOI10.7795/EMPIR.14IND02.CA.20190403
ISBN978-1-5386-4356-3
Web URLhttps://doi.org/10.1109/ARFTG.2017.8255874
LanguageEnglish

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